Hsinchu
Taiwan
30
2025-10-02
The entities that hold a legal rights for patent applications filed by inventor DAI Yi-Ming:
Yi-Ming DAI from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:
MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER
#2 | 2025-09-18METHOD FOR DEPOSITING TARGET MATERIAL IN DEPOSITION CHAMBER WITH TILTABLE WORKPIECE HOLDER
#3 | 2025-03-13DEPOSITION SYSTEM AND METHOD
#4 | 2024-11-28TREATMENT SYSTEM AND METHOD
#5 | 2024-05-23MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER
#6 | 2023-11-30Deposition system and method
#7 | 2023-11-02Deposition system and method
#8 | 2023-10-19Treatment system and method
#9 | 2023-08-31Semiconductor device and method of forming the same
#10 | 2022-11-10WAFER HOLDER FOR FILM DEPOSITION CHAMBER
#11 | 2022-11-10SYSTEM AND METHOD FOR MONITORING AND PERFORMING THIN FILM DEPOSITION
#12 | 2022-11-10Providing multifunctional shutter disk above the workpiece in the multifunctional chamber during degassing or pre-cleaning of the workpiece, and storing the multifunctional shutter disc during deposition process in the same multifunctional chamber
#13 | 2022-10-20Deposition system and method
#14 | 2022-10-06SYSTEM AND METHOD FOR CORRECTING NON-IDEAL WAFER TOPOGRAPHY
#15 | 2022-02-17Deposition system and method
#16 | 2021-12-16Treatment system and method
#17 | 2021-11-11Semiconductor device and method of forming the same
#18 | 2021-06-24SYSTEM AND METHOD FOR MONITORING AND PERFORMING THIN FILM DEPOSITION
#19 | 2021-04-22Movable wafer holder for film deposition chamber having six degrees of freedom
#20 | 2021-04-22Shutter disk having lamp, power, and/or gas modules arranged at the first side of the shutter disk of thin film deposition chamber
#21 | 2020-12-24System and method for correcting non-ideal wafer topography
#22 | 2020-08-06Metrology method in wafer transportation
#23 | 2020-03-05Semiconductor device and method of forming the same
#24 | 2020-01-30Apparatus for fabricating a semiconductor device with target sputtering and target sputtering method for fabricating the semiconductor device
#25 | 2019-05-30Metrology method in wafer transportation
#26 | 2019-05-30Metrology method in reticle transportation
#27 | 2019-01-31System and method for correcting non-ideal wafer topography
#28 | 2017-05-04Photolithography tool and method thereof
#29 | 2016-06-30Apparatus and method for supplying chemical solution on semiconductor substrate
#30 | 2007-02-01Phase shift photomask performance assurance method
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