Michael Behnke

City:

Eislingen

Country:

Germany

Published Applications:

Last publication date:

2026-01-22

Top Assignees for applications by Michael Behnke

The entities that hold a legal rights for patent applications filed by inventor Behnke Michael:

Carl Zeiss MultiSEM GmbH 2 Oberkochen, Germany

Recent patent applications by Behnke Michael

Michael Behnke from Eislingen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-01-22

US20260024721A1

Electricity

HIGH THROUGHPUT MULTI-BEAM CHARGED PARTICLE INSPECTION SYSTEM WITH DYNAMIC CONTROL

#2 | 2025-03-27

US20250104961A1

Electricity

METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE, COMPUTER PROGRAM PRODUCT AND MULTI-BEAM PARTICLE MICROSCOPE

#3 | 2024-04-18

US20240128048A1

Electricity

METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE WITH FAST CLOSED-LOOP BEAM CURRENT CONTROL, COMPUTER PROGRAM PRODUCT AND MULTI-BEAM PARTICLE MICROSCOPE

#4 | 2023-02-09

US20230043036A1

Electricity

HIGH THROUGHPUT MULTI-BEAM CHARGED PARTICLE INSPECTION SYSTEM WITH DYNAMIC CONTROL

#5 | 2022-08-04

US20220246388A1

Electricity

Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt

#6 | 2021-06-24

US20210192700A1

Physics

Method for detector equalization during the imaging of objects with a multi-beam particle microscope

InventorID:

5118692 ⎘