Patrick G. Breiling

City:

Tigard, Oregon

Country:

United States

Published Applications:

Last publication date:

2026-05-28

Top Assignees for applications by Patrick G. Breiling

The entities that hold a legal rights for patent applications filed by inventor Breiling Patrick G.:

Patrick G. Breiling from Tigard, US has applied for patents for these inventions. The list has both pending applications and granted patents:

HEAT FLOW CONTROL IN A PROCESSING TOOL

A WAFER CHUCK ASSEMBLY WITH THERMAL INSULATION FOR RF CONNECTIONS

METHOD AND APPARATUS FOR RADIO FREQUENCY GRID DESIGN IN AN ESC TO REDUCE FILM ASYMMETRY

Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

REMOTE PLASMA ARCHITECTURE FOR TRUE RADICAL PROCESSING

Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression

Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression

InventorID:

5132166 ⎘