Thilo Pollak

City:

Neresheim

Country:

Germany

Published Applications:

Last publication date:

2026-03-12

Top Assignees for applications by Thilo Pollak

The entities that hold a legal rights for patent applications filed by inventor Pollak Thilo:

Thilo Pollak from Neresheim, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

METHOD FOR OPERATING A SOLID-STATE ACTUATOR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

OPTICAL ASSEMBLY, PROJECTION EXPOSURE SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY, AND METHOD

METHOD FOR COMPENSATING ACTUATOR EFFECTS OF ACTUATORS

OPTICAL DEVICE, METHOD FOR ADJUSTING A SETPOINT DEFORMATION AND LITHOGRAPHY SYSTEM

A PROJECTION OBJECTIVE INCLUDING AN OPTICAL DEVICE

MIRROR ASSEMBLY HAVING A HYDROGEN BARRIER AND OPTICAL ASSEMBLY

MIRROR ASSEMBLY AND OPTICAL ASSEMBLY COMPRISING SAME

MODULE FOR A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A SEMI-ACTIVE SPACER, AND METHOD FOR USING THE SEMI-ACTIVE SPACER

InventorID:

5167136 ⎘