Essingen
Germany
3
2026-03-12
The entities that hold a legal rights for patent applications filed by inventor Pagel Daniel:
Daniel Pagel from Essingen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD FOR PRODUCING AN OPTICAL IMAGING SYSTEM FOR A MICROLITHOGRAPHY APPARATUS
#2 | 2023-04-27Method for reproducing a target wavefront of an imaging optical production system, and metrology system for carrying out the method
#3 | 2022-02-24METHOD FOR APPROXIMATING IMAGING PROPERTIES OF AN OPTICAL PRODUCTION SYSTEM TO THOSE OF AN OPTICAL MEASUREMENT SYSTEM, AND METROLOGY SYSTEM TO THIS END
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