Yu-Fa LO

City:

Kaohsiung

Country:

Taiwan

Published Applications:

Last publication date:

2026-04-30

Top Assignees for applications by Yu-Fa LO

The entities that hold a legal rights for patent applications filed by inventor LO Yu-Fa:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 8 Hsinchu, Taiwan

Recent patent applications by LO Yu-Fa

Yu-Fa LO from Kaohsiung, TW has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-04-30

US20260118771A1

Physics

PROTECTIVE RING STRUCTURE FOR VACUUM INTERFACE AND METHOD OF USING THE SAME

#2 | 2024-10-31

US20240361701A1

Physics

NOVEL DESIGN OF AN INSPECTION TOOL FOR AN EXTREME ULTRAVIOLET RADIATION SOURCE TO OBSERVE TIN RESIDUAL

#3 | 2023-10-26

US20230345610A1

Electricity

METHOD AND APPARATUS FOR MONITORING AN EXTREME ULTRAVIOLET RADIATION SOURCE

#4 | 2023-05-25

US20230164901A1

Electricity

Method for using radiation source apparatus

#5 | 2023-03-02

US20230067967A1

Physics

Inspection tool for an extreme ultraviolet radiation source to observe tin residual

#6 | 2023-01-12

US20230010810A1

Electricity

System and method for supplying target material in an EUV light source

#7 | 2022-12-22

US20220408537A1

Electricity

Droplet collecting system and method of using the same

#8 | 2022-11-17

US20220365442A1

Physics

Semiconductor processing tool and methods of operation

#9 | 2022-09-22

US20220304131A1

Electricity

Radiation source apparatus and method for using the same

#10 | 2022-03-31

US20220100101A1

Physics

PROTECTIVE RING STRUCTURE FOR VACUUM INTERFACE AND METHOD OF USING THE SAME

InventorID:

5366209 ⎘