Hsinchu
Taiwan
3
2025-09-11
The entities that hold a legal rights for patent applications filed by inventor CHEN Yi-Ko:
Yi-Ko CHEN from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:
FEATURE PATTERNING USING PITCH RELAXATION AND DIRECTIONAL END-PUSHING WITH ION BOMBARDMENT
#2 | 2023-09-21Feature patterning using pitch relaxation and directional end-pushing with ion bombardment
#3 | 2022-03-31Feature patterning using pitch relaxation and directional end-pushing with ion bombardment
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