Sunnyvale, California
United States
17
2026-05-21
The entities that hold a legal rights for patent applications filed by inventor PETER Daniel:
Daniel PETER from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
SELECTIVELY ETCHING FOR NANOWIRES
#2 | 2026-04-16DRY CHAMBER CLEAN USING THERMAL AND PLASMA PROCESSES
#3 | 2026-03-12PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES
#4 | 2026-02-05INTEGRATION OF DRY DEVELOPMENT AND ETCH PROCESSES FOR EUV PATTERNING IN A SINGLE PROCESS CHAMBER
#5 | 2025-09-18INTEGRATION OF DRY DEVELOPMENT AND ETCH PROCESSES FOR EUV PATTERNING IN A SINGLE PROCESS CHAMBER
#6 | 2025-03-20REWORK OF METAL-CONTAINING PHOTORESIST
#7 | 2024-12-19PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES
#8 | 2024-10-31PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES
#9 | 2024-10-24DRY DEVELOPMENT APPARATUS AND METHODS FOR VOLATILIZATION OF DRY DEVELOPMENT BYPRODUCTS IN WAFERS
#10 | 2024-02-01CONTROL OF METALLIC CONTAMINATION FROM METAL-CONTAINING PHOTORESIST
#11 | 2023-10-05DRY BACKSIDE AND BEVEL EDGE CLEAN OF PHOTORESIST
#12 | 2023-04-20SELECTIVE ETCH USING DEPOSITION OF A METALLOID OR METAL CONTAINING HARDMASK
#13 | 2023-02-16ALLOY FILM ETCH
#14 | 2022-10-27DRY CHAMBER CLEAN OF PHOTORESIST FILMS
#15 | 2022-08-04Photoresist development with halide chemistries
#16 | 2022-06-30Deposition of self assembled monolayer for enabling selective deposition and etch
#17 | 2022-04-21Selective etch using a sacrificial mask
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