Mohammad Awad

City:

Heidenheim

Country:

Germany

Published Applications:

Last publication date:

2025-02-27

Top Assignees for applications by Mohammad Awad

The entities that hold a legal rights for patent applications filed by inventor Awad Mohammad:

Mohammad Awad from Heidenheim, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

OPTICAL SYSTEM, LITHOGRAPHY APPARATUS HAVING AN OPTICAL SYSTEM, AND METHOD FOR PRODUCING AN OPTICAL SYSTEM

METHOD AND DEVICE FOR MEASURING ACTUATORS IN A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

Mirror, in particular for microlithography

Drive device, optical system and lithography apparatus

Modulation device, control device, optical system, lithography system and method

InventorID:

5406147 ⎘