Newberg, Oregon
United States
3
2025-01-16
The entities that hold a legal rights for patent applications filed by inventor PHILLIPS Richard:
Richard PHILLIPS from Newberg, US has applied for patents for these inventions. The list has both pending applications and granted patents:
PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION (ALD) SUBSTRATE PROCESSING CHAMBERS
#2 | 2022-07-21INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMICONDUCTOR PROCESSING
#3 | 2022-05-26Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers
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