Tigard, Oregon
United States
15
2026-02-12
The entities that hold a legal rights for patent applications filed by inventor BATZER Rachel E.:
Rachel E. BATZER from Tigard, US has applied for patents for these inventions. The list has both pending applications and granted patents:
INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMICONDUCTOR PROCESSING
#2 | 2025-07-10DEPOSITION OF METAL-CONTAINING FILMS AND CHAMBER CLEAN
#3 | 2025-04-24TRANSFORMER COUPLED PLASMA SOURCE DESIGN FOR THIN DIELECTRIC FILM DEPOSITION
#4 | 2025-01-16APPARATUSES AND TECHNIQUES FOR CLEANING A MULTI-STATION SEMICONDUCTOR PROCESSING CHAMBER
#5 | 2025-01-02APPARATUSES FOR CLEANING A MULTI-STATION SEMICONDUCTOR PROCESSING CHAMBER
#6 | 2025-01-02INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION
#7 | 2024-12-12APPARATUSES AND SYSTEMS FOR AMMONIA/CHLORINE CHEMISTRY SEMICONDUCTOR PROCESSING
#8 | 2024-09-26INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION
#9 | 2024-07-04MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE COATING WITH INTERMITTENT RESTORATION PLASMA
#10 | 2023-11-23SHOWERHEAD WITH INTEGRAL DIVERT FLOW PATH
#11 | 2023-10-19REMOTE PLASMA ARCHITECTURE FOR TRUE RADICAL PROCESSING
#12 | 2023-09-28WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION
#13 | 2023-07-13INCREASING PLASMA UNIFORMITY IN A RECEPTACLE
#14 | 2023-06-08Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
#15 | 2022-09-08PEDESTAL SETUP USING CAMERA WAFER
5511538 ⎘