Tokyo
Japan
2
2026-04-02
The entities that hold a legal rights for patent applications filed by inventor EBATA Shinya:
Shinya EBATA from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS
#2 | 2022-09-22METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS
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