Saalfeld
Germany
3
2019-04-25
The entities that hold a legal rights for patent applications filed by inventor Frank Thomas:
Thomas Frank from Saalfeld, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
#2 | 2015-01-01Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
#3 | 2013-12-05Microscope and method for characterizing structures on an object
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