Jena
Germany
5
2019-04-11
The entities that hold a legal rights for patent applications filed by inventor Trautzsch Thomas:
Thomas Trautzsch from Jena, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out
#2 | 2018-04-05Method and device for determining an OPC model
#3 | 2015-07-16Method and device for examining a mask
#4 | 2013-12-05Microscope and method for characterizing structures on an object
#5 | 2011-09-15Monitoring of time-varying defect classification performance
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