Boise, Idaho
United States
6
2014-07-24
The entities that hold a legal rights for patent applications filed by inventor LIGHT SCOTT:
SCOTT LIGHT from Boise, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods of forming patterns for semiconductor device structures
#2 | 2013-12-05Reticle with composite polarizer and method of simultaneous optimization of imaging of a set of different patterns
#3 | 2012-10-11Illumination design for lens heating mitigation
#4 | 2012-07-12Imaging devices, methods of forming same, and methods of forming semiconductor device structures
#5 | 2012-07-12Methods of forming a patterned, silicon-enriched developable antireflective material and semiconductor device structures including the same
#6 | 2012-02-16Lens heating compensation in photolithography
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