Kai-Wei Lan

City:

Champaign, Illinois

Country:

United States

Published Applications:

Last publication date:

2023-10-05

Top Assignees for applications by Kai-Wei Lan

The entities that hold a legal rights for patent applications filed by inventor Lan Kai-Wei:

Kai-Wei Lan from Champaign, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Electrodeposition compatible anti-reflection coatings for laser interference lithography applications

Controlling porosity of an interference lithography process by fine tuning exposure time

SU-8 etching technique using molten salt

Graded pore structure without phase mask

INTERFERENCE LITHOGRAPHY USING REFLECTIVE BASE SURFACES

InventorID:

5654569 ⎘