Cheonan-si
South Korea
13
2025-03-20
The entities that hold a legal rights for patent applications filed by inventor SON Young Jun:
Young Jun SON from Cheonan-si, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#2 | 2024-06-06SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#3 | 2024-05-16APPARATUS FOR TREATING SUBSTRATE AND RELATED MANUFACTURING METHOD
#4 | 2023-10-05LIQUID CHEMICAL SUPPLY APPARATUS AND LIQUID CHEMICAL SUPPLY SYSTEM
#5 | 2023-09-07WAFER TREATMENT APPARATUS CAPABLE OF MEASURING WARPAGE OF WAFER AND METHOD OF MEASURING WARPAGE OF WAFER
#6 | 2023-06-29HOME PORT, AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME
#7 | 2023-06-29APPARATUS FOR TREATING A SUBSTRATE AND ELECTROSTATIC MONITORING METHOD OF TREATMENT LIQUID
#8 | 2023-06-22TORSION PUMP AND APPARATUS FOR SUPPLYING CHEMICAL LIQUID
#9 | 2023-06-22Home port and substrate processing apparatus using same
#10 | 2023-06-22CHILLING UNIT, HEAT TREATMENT APPARATUS INCLUDING SAME, AND HEAT TREATMENT METHOD
#11 | 2023-06-08HOME PORT, AND SUBSTRATE PROCESSING APPARATUS AND HOME PORT CLEANING METHOD USING THE SAME
#12 | 2023-04-27TORSION PUMP AND CHEMICAL LIQUID SUPPLY UNIT
#13 | 2023-03-09PUMP, CHEMICAL LIQUID SUPPLYING UNIT, AND SUBSTRATE TREATING APPARATUS
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