Munich
Germany
25
2023-03-23
The entities that hold a legal rights for patent applications filed by inventor HORN Jan:
Jan HORN from Munich, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Mirror, in particular for microlithography
#2 | 2022-01-06Optical arrangement and lithography apparatus
#3 | 2021-06-24METHOD FOR OPERATING A LIDAR SYSTEM
#4 | 2021-03-04Multi-beam particle beam system
#5 | 2021-01-28Apparatus and method for ascertaining a distance to an object
#6 | 2020-11-19Image sensor, position sensor device, lithography system, and method for operating an image sensor
#7 | 2020-04-16System, method and marker for the determination of the position of a movable object in space
#8 | 2019-08-22Multi-beam particle beam system
#9 | 2019-06-27Device for transmitting electrical signals, and lithography apparatus
#10 | 2019-06-20Control device
#11 | 2018-07-05Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system
#12 | 2018-03-08Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
#13 | 2018-03-08Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
#14 | 2018-01-04Multi-mirror array
#15 | 2017-02-09Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
#16 | 2016-09-15Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#17 | 2016-08-25Device for determining a tilt angle of at least one mirror of a lithography system, and method
#18 | 2016-06-16Optical component
#19 | 2016-01-28Optical module
#20 | 2015-10-22Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#21 | 2014-08-21Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#22 | 2014-08-14Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#23 | 2013-04-11Methods and devices for driving micromirrors
#24 | 2012-11-22Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#25 | 2010-12-09Illumination system for a microlithographic projection exposure apparatus
5691658 ⎘