Austin, Texas
United States
7
2013-12-19
The entities that hold a legal rights for patent applications filed by inventor Benjamin Neil:
Neil Benjamin from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Integrated steerability array arrangement for minimizing non-uniformity and methods thereof
#2 | 2009-06-11Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system
#3 | 2009-03-26Distributed power arrangements for localizing power delivery
#4 | 2009-03-26Integrated steerability array arrangement for minimizing non-uniformity
#5 | 2009-01-01ARRAYS OF INDUCTIVE ELEMENTS FOR MINIMIZING RADIAL NON-UNIFORMITY IN PLASMA
#6 | 2006-11-30Smart component-based management techniques in a substrate processing system
#7 | 2006-03-02Smart component-based management techniques in a substrate processing system
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