Aalen
Germany
3
2013-12-19
The entities that hold a legal rights for patent applications filed by inventor Bresan Andre:
Andre Bresan from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type
#2 | 2011-04-14Optical integrator for an illumination system of a microlithographic projection exposure apparatus
#3 | 2009-01-22Optical integrator for an illumination system of a microlithographic projection exposure apparatus
574859 ⎘