Michael C. Kellogg

City:

Pleasanton, California

Country:

United States

Published Applications:

Last publication date:

2014-12-18

Top Assignees for applications by Michael C. Kellogg

The entities that hold a legal rights for patent applications filed by inventor Kellogg Michael C.:

LAM RESEARCH CORPORATION 8 Fremont, CA United States

Recent patent applications by Kellogg Michael C.

Michael C. Kellogg from Pleasanton, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2014-12-18

US20140367047A1

Electricity

EDGE RING ASSEMBLY FOR PLASMA ETCHING CHAMBERS

#2 | 2013-12-19

US20130337654A1

Electricity

Clamped monolithic showerhead electrode

#3 | 2012-10-11

US20120258603A1

Electricity

Clamped monolithic showerhead electrode

#4 | 2012-07-05

US20120171872A1

Electricity

Clamped showerhead electrode assembly

#5 | 2011-06-02

US20110126984A1

Electricity

Edge ring assembly for plasma etching chambers

#6 | 2010-02-25

US20100044974A1

Electricity

Edge rings for electrostatic chucks

#7 | 2010-01-07

US20100003829A1

Electricity

Clamped monolithic showerhead electrode

#8 | 2010-01-07

US20100003824A1

Electricity

Clamped showerhead electrode assembly

#9 | 2010-01-07

US20100000683A1

Electricity

Showerhead electrode

InventorID:

577423 ⎘