Daegu
South Korea
3
2023-07-06
The entities that hold a legal rights for patent applications filed by inventor KO Young Ran:
Young Ran KO from Daegu, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
APPARATUS AND METHOD FOR INSPECTING ELECTROSTATIC CHUCK FOR SUBSTRATE PROCESSING
#2 | 2023-06-29APPARATUS AND METHOD FOR INSPECTING GAS LEAK
#3 | 2023-06-29METHOD AND EQUIPMENT FOR LEAKAGE TESTING OF ELECTROSTATIC CHUCK
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