Tokyo
Japan
2
2023-10-26
Ping Ren from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING APPARATUS INCLUDING EXHAUST DUCT WITH A BEVEL MASK WITH A PLANAR INNER EDGE
REMOTE PLASMA UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING REMOTE PLASMA
5793387 ⎘