John Breuer

METHOD OF DETERMINING ABERRATIONS OF A CHARGED PARTICLE BEAM, METHOD OF DETERMINING CD INFORMATION, CORRESPONDING GENERATION OF COMPUTATIONAL MODELS, AND CORRESPONDING SYSTEMS

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE

ABERRATION CORRECTOR, A CHARGED PARTICLE BEAM APPARATUS, A METHOD OF ALIGNING AN ABERRATION CORRECTOR AND A METHOD OF CORRECTING ABERRATION OF A CHARGED PARTICLE BEAM

METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELECTRON BEAM, AND MULTIPOLE DEVICE

CHARGED PARTICLE BEAM SYSTEM, CORRECTOR FOR ABERRATION CORRECTION OF A CHARGED PARTICLE BEAM, AND METHOD THEREOF

METHOD OF DETERMINING A BRIGHTNESS OF A CHARGED PARTICLE BEAM, METHOD OF DETERMINING A SIZE OF A SOURCE OF THE CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE

Methods of determining aberrations of a charged particle beam, and charged particle beam system

Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system

Methods of determining aberrations of a charged particle beam, and charged particle beam system

Aberration corrector and method of aligning aberration corrector

Charged particle beam apparatus and method of controlling sample charge

Primary charged particle beam current measurement

Charged particle beam device with interferometer for height measurement

Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen

Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets