Inventor profile of:

Tomohiro Kobayashi

City:

Joetsu

Country:

Japan

Published Applications:

52

Last publication date:

2023-09-07

Top Assignees for applications by Tomohiro Kobayashi

The entities that hold a legal rights for patent applications filed by inventor Kobayashi Tomohiro:

Recent patent applications by Kobayashi Tomohiro

Tomohiro Kobayashi from Joetsu, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-09-07
US20230280651A1
Physics

Resist composition and patterning process

#2 | 2022-07-28
US20220236643A1
Physics

Resist composition and patterning process

#3 | 2021-07-01
US20210200083A1
Physics

Resist composition and patterning process

#4 | 2021-05-20
US20210149301A1
Physics

Onium salt compound, chemically amplified resist composition and patterning process

#5 | 2021-03-04
US20210063873A1
Physics

Resist material and patterning process

#6 | 2021-03-04
US20210063871A1
Physics

Resist material and patterning process

#7 | 2020-10-29
US20200340806A1
Physics

Method for measuring distance of diffusion of curing catalyst

#8 | 2020-08-06
US20200249571A1
Physics

Resist composition and patterning process

#9 | 2020-04-30
US20200133123A1
Physics

Substrate protective film-forming composition and pattern forming process

#10 | 2019-05-30
US20190163065A1
Physics

Patterning process

#11 | 2015-03-26
US20150086926A1
Chemistry; metallurgy

Sulfonium salt, chemically amplified resist composition, and pattern forming process

#12 | 2014-10-30
US20140322650A1
Physics

Patterning process and resist composition

#13 | 2014-10-16
US20140308614A1
Physics

Patterning process, resist composition, polymer, and monomer

#14 | 2014-09-11
US20140255843A1
Physics

Patterning process and resist composition

#15 | 2014-08-28
US20140242518A1
Physics

Patterning process and resist composition

#16 | 2014-07-31
US20140212808A1
Physics

Patterning process and resist composition

#17 | 2014-07-17
US20140199632A1
Physics

Patterning process, resist composition, polymer, and monomer

#18 | 2014-01-09
US20140011136A1
Physics

Patterning process and resist composition

#19 | 2013-12-19
US20130337383A1
Physics

Patterning process and resist composition

#20 | 2013-09-05
US20130231491A1
Physics

Fluorinated monomer of cyclic acetal structure, polymer, resist protective coating composition, resist composition, and patterning process

#21 | 2013-08-29
US20130224660A1
Chemistry; metallurgy

Preparation of polymer, resulting polymer, resist composition, and patterning process

#22 | 2013-08-29
US20130224659A1
Physics

Polymer, making method, resist composition, and patterning process

#23 | 2013-06-20
US20130157194A1
Physics

Patterning process, resist composition, polymer, and polymerizable ester compound

#24 | 2013-05-23
US20130130183A1
Physics

Negative pattern forming process

#25 | 2013-02-28
US20130052587A1
Physics

Patterning process and resist composition

#26 | 2012-12-27
US20120328987A1
Physics

Patterning process and resist composition

#27 | 2012-12-06
US20120308930A1
Physics

Patterning process and resist composition

#28 | 2012-11-01
US20120276485A1
Physics

Patterning process

#29 | 2012-10-25
US20120270159A1
Physics

Patterning process

#30 | 2012-09-06
US20120225386A1
Physics

Chemically amplified resist composition and patterning process

#31 | 2012-08-02
US20120196227A1
Physics

Chemically amplified positive resist composition, patterning process, and acid-decomposable keto ester compound

#32 | 2012-07-19
US20120183904A1
Physics

Nitrogen-containing monomer, polymer, resist composition, and patterning process

#33 | 2012-05-31
US20120135350A1
Physics

Positive resist composition and patterning process

#34 | 2012-04-26
US20120100486A1
Chemistry; metallurgy

Sulfonium salt, resist composition, and patterning process

#35 | 2012-03-29
US20120077121A1
Chemistry; metallurgy

Fluoroalcohol, fluorinated monomer, polymer, resist composition and patterning process

#36 | 2012-03-01
US20120052441A1
Chemistry; metallurgy

Nitrogen-containing organic compound, chemically amplified positive resist composition, and patterning process

#37 | 2012-02-23
US20120045724A1
Chemistry; metallurgy

Sulfonium salt, resist composition, and patterning process

#38 | 2010-12-02
US20100304295A1
Chemistry; metallurgy

Acid-labile ester monomer having spirocyclic structure, polymer, resist composition, and patterning process

#39 | 2010-06-03
US20100136482A1
Physics

Resist composition and patterning process

#40 | 2010-05-06
US20100112482A1
Physics

Fluorinated monomer of cyclic acetal structure, polymer, resist protective coating composition, resist composition, and patterning process

#41 | 2009-10-01
US20090246686A1
Chemistry; metallurgy

Polymer, polymer preparation method, resist composition and patterning process

#42 | 2009-08-20
US20090208873A1
Physics

Polymer, resist composition, and patterning process

#43 | 2009-08-20
US20090208867A1
Physics

Resist composition, resist protective coating composition, and patterning process

#44 | 2009-07-23
US20090186307A1
Physics

Hydrogenated ring-opening metathesis polymer, resist composition and patterning process

#45 | 2009-01-08
US20090011365A1
Physics

Resist composition and patterning process

#46 | 2008-10-02
US20080241736A1
Physics

Resist composition and patterning process

#47 | 2008-05-22
US20080118860A1
Physics

Polymer, resist composition, and patterning process

#48 | 2008-05-01
US20080102405A1
Physics

Nitrogen-containing organic compound, resist composition and patterning process

#49 | 2008-04-10
US20080085470A1
Physics

Hydrogenated ring-opening metathesis polymer, resist composition comprising the same and patterning method

#50 | 2008-01-10
US20080008960A1
Physics

Positive resist compositions and patterning process

#51 | 2008-01-10
US20080008959A1
Physics

Positive resist compositions and patterning process

#52 | 2007-06-28
US20070148594A1
Physics

Polymers, resist compositions and patterning process

InventorID:

6011101 ⎘