Handa
Japan
12
2022-03-31
The entities that hold a legal rights for patent applications filed by inventor Aikawa Kenichiro:
Kenichiro Aikawa from Handa, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Wafer placement table and method of manufacturing the same
#2 | 2022-02-17Ceramic heater with shaft
#3 | 2022-02-10Ceramic heater with shaft
#4 | 2022-02-03Electrostatic chuck heater
#5 | 2021-12-23Wafer placement table
#6 | 2021-12-23Electrostatic chuck with high insulation performance and electrostatic attraction force
#7 | 2021-07-22Electrostatic chuck heater
#8 | 2021-07-22Ceramic heater
#9 | 2020-08-06Electrostatic chuck assembly, electrostatic chuck, and focus ring
#10 | 2020-04-23Electrostatic chuck and method for manufacturing the same
#11 | 2013-09-12Electrostatic chuck
#12 | 2013-09-05Electrostatic chuck
6032185 ⎘