Hsinchu
Taiwan
14
2020-02-27
The entities that hold a legal rights for patent applications filed by inventor Wu Jui-Ching:
Jui-Ching Wu from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithography system with an embedded cleaning module
#2 | 2019-08-15System and method for performing lithography process in semiconductor device fabrication
#3 | 2016-12-22Rotary EUV collector
#4 | 2016-02-25System and method for performing lithography process in semiconductor device fabrication
#5 | 2015-11-19Semiconductor integrated circuit fabrication with pattern-reversing process
#6 | 2015-11-12Particle removal system and method thereof
#7 | 2015-09-17Method for integrated circuit patterning
#8 | 2015-09-10System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle
#9 | 2015-08-27Method for lithography patterning
#10 | 2015-03-26Rotary EUV collector
#11 | 2014-09-18Lithography system with an embedded cleaning module
#12 | 2014-09-11Lithography layer with quenchers to prevent pattern collapse
#13 | 2014-08-07System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle
#14 | 2013-03-28Patterning process and materials for lithography
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