Joetsu
Japan
4
2022-09-08
The entities that hold a legal rights for patent applications filed by inventor Mimura Shohei:
Shohei Mimura from Joetsu, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Reflective mask blank and reflective mask
#2 | 2022-05-05Phase shift mask blank, manufacturing method of phase shift mask, and phase shift mask
#3 | 2022-03-17Phase shift mask blank, method for producing phase shift mask, and phase shift mask
#4 | 2021-10-14Reflective mask blank, method of manufacturing thereof, and reflective mask
6054230 ⎘