Michael G. R. Smith

City:

Dublin, California

Country:

United States

Published Applications:

Last publication date:

2008-09-25

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Michael G. R. Smith from Dublin, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Methods for processing wafer surfaces using thin, high velocity fluid layer

Substrate proximity processing structures

Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency

Concentric proximity processing head

Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same

Substrate proximity processing housing and insert for generating a fluid meniscus

Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer

Proximity meniscus manifold

InventorID:

6078394 ⎘