Erding
Germany
36
2021-05-20
The entities that hold a legal rights for patent applications filed by inventor LANIO Stefan:
Stefan LANIO from Erding, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Secondary charged particle imaging system
#2 | 2020-12-03Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
#3 | 2018-12-20On-axis illumination and alignment for charge control during charged particle beam inspection
#4 | 2018-11-15Method of operating a charged particle beam specimen inspection system
#5 | 2018-09-06Simplified particle emitter and method of operating thereof
#6 | 2017-07-04Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device
#7 | 2017-05-30Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device
#8 | 2017-05-30System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device
#9 | 2017-03-16System for imaging a secondary charged particle beam with adaptive secondary charged particle optics
#10 | 2017-01-05System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics
#11 | 2016-10-18Beam separator device, charged particle beam device and methods of operating thereof
#12 | 2016-08-18Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam
#13 | 2016-06-30SCANNING CHARGED PARTICLE BEAM DEVICE HAVING AN ABERRATION CORRECTION APERTURE AND METHOD OF OPERATING THEREOF
#14 | 2016-02-04Charged particle beam specimen inspection system and method for operation thereof
#15 | 2015-08-13SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
#16 | 2015-01-22Switchable multi perspective detector, optics therefore and method of operating thereof
#17 | 2014-07-10Contamination reduction electrode for particle detector
#18 | 2014-06-26SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
#19 | 2014-04-17Octopole device and method for spot size improvement
#20 | 2013-12-05CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR
#21 | 2013-10-17Switchable multi perspective detector, optics therefor and method of operating thereof
#22 | 2013-01-31Shielding member having a charge control electrode, and a charged particle beam apparatus
#23 | 2012-04-19SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF
#24 | 2012-02-16Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
#25 | 2011-11-10Electron beam device with dispersion compensation, and method of operating same
#26 | 2011-04-21Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator
#27 | 2009-10-22Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
#28 | 2008-06-12ADJUSTABLE APERTURE ELEMENT FOR PARTICLE BEAM DEVICE, METHOD OF OPERATING AND MANUFACTURING THEREOF
#29 | 2007-11-08Charged particle beam device with aperture
#30 | 2007-08-30Double stage charged particle beam energy width reduction system for charged particle beam system
#31 | 2007-07-12Single stage charged particle beam energy width reduction system for charged particle beam system
#32 | 2007-03-29Charged particle beam energy width reduction system for charged particle beam system
#33 | 2006-10-12Stabilized emitter and method for stabilizing same
#34 | 2006-10-12Analyzing system and charged particle beam device
#35 | 2006-07-27Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
#36 | 2006-07-13High current density particle beam system
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