Utsunomiya
Japan
5
2021-04-22
The entities that hold a legal rights for patent applications filed by inventor Kobayashi Daisuke:
Daisuke Kobayashi from Utsunomiya, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Exposure apparatus, exposure method, and method of manufacturing article
#2 | 2019-03-14Illumination optical system, exposure apparatus, and method of manufacturing article
#3 | 2019-02-28Exposure apparatus, adjusting method, and article manufacturing method
#4 | 2015-12-17Exposure apparatus and method of manufacturing article
#5 | 2005-10-20Exposure apparatus, and device manufacturing method
6092295 ⎘