Tama
Japan
6
2010-02-25
The entities that hold a legal rights for patent applications filed by inventor Wickramanayaka Sunil:
Sunil Wickramanayaka from Tama, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Electrostatic chuck device
#2 | 2009-11-24Electrostatic chuck device
#3 | 2009-05-14Electrostatic chuck device
#4 | 2009-03-05Electrostatic chuck device
#5 | 2005-07-14Plasma-assisted sputter deposition system
#6 | 2005-02-10Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems
6095786 ⎘