Chofu
Japan
6
2011-05-19
The entities that hold a legal rights for patent applications filed by inventor Doi Hiroshi:
Hiroshi Doi from Chofu, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Heat treatment apparatus and semiconductor device manufacturing method
#2 | 2010-06-17Substrate processing apparatus, substrate annealing method, and semiconductor device manufacturing method
#3 | 2009-12-31Vacuum heating apparatus
#4 | 2009-08-13Heating apparatus, heating method, and semiconductor device manufacturing method
#5 | 2009-07-30Substrate heating apparatus, heating method, and semiconductor device manufacturing method
#6 | 2005-02-10Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems
6095788 ⎘