Joetsu
Japan
8
2009-10-08
The entities that hold a legal rights for patent applications filed by inventor Nakashima Mutsuo:
Mutsuo Nakashima from Joetsu, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Double patterning process
#2 | 2009-05-28Metal oxide-containing film-forming composition, metal oxide-containing film, metal oxide-containing film-bearing substrate, and patterning method
#3 | 2008-12-18Silsesquioxane compound mixture, hydrolyzable silane compound, making methods, resist composition, patterning process, and substrate processing
#4 | 2007-09-20Fluorine-containing silicon compounds, silicone resins, resist compositions, and patterning process
#5 | 2007-08-16Resist composition and patterning process using the same
#6 | 2007-01-11Fluorinated cyclic structure-bearing silicon compounds and silicone resins, resist compositions using the same, and patterning process
#7 | 2006-10-05Silsesquioxane compound mixture, method of making, resist composition, and patterning process
#8 | 2006-02-23Resist composition and patterning process
6110656 ⎘