Joetsu
Japan
27
2013-05-23
The entities that hold a legal rights for patent applications filed by inventor Yoshikawa Hiroki:
Hiroki Yoshikawa from Joetsu, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Light pattern exposure method, photomask, and photomask blank
#2 | 2013-05-23Light pattern exposure method, halftone phase shift mask, and halftone phase shift mask blank
#3 | 2013-05-23Evaluation of etching conditions for pattern-forming film
#4 | 2013-03-07Photomask blank, photomask, and making method
#5 | 2012-10-04Photomask blank and method for manufacturing photomask
#6 | 2012-03-15Photomask blank and making method, photomask, light pattern exposure method, and design method of transition metal/silicon base material film
#7 | 2012-02-09Binary photomask blank and binary photomask making method
#8 | 2010-12-16Photomask making method
#9 | 2010-11-18Etching method and photomask blank processing method
#10 | 2010-10-14Photomask blank and photomask
#11 | 2010-10-14Photomask blank and photomask
#12 | 2010-10-14Photomask blank and photomask making method
#13 | 2010-09-30Method for inspecting photomask blank or intermediate thereof, method for determining dosage of high-energy radiation, and method for manufacturing photomask blank
#14 | 2010-09-30Photomask blank and photomask
#15 | 2010-09-30Method for inspecting and judging photomask blank or intermediate thereof
#16 | 2010-06-10Photomask blank and photomask
#17 | 2008-03-13Photomask blank and photomask
#18 | 2007-10-25Photomask blank
#19 | 2007-09-13Photomask blank and photomask making method
#20 | 2007-09-13Photomask blank and photomask
#21 | 2006-08-10Half-tone stacked film, photomask-blank, photomask and fabrication method thereof
#22 | 2006-04-27Photomask blank, photomask and fabrication method thereof
#23 | 2005-11-24Preparation of photomask blank and photomask
#24 | 2005-11-03Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method
#25 | 2005-10-06Film-depositing target and preparation of phase shift mask blank
#26 | 2005-08-25Halftone phase shift mask blank, halftone phase shift mask and their preparation
#27 | 2005-08-25Preparation of halftone phase shift mask blank
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