Hsinchu
Taiwan
2
2008-03-27
The entities that hold a legal rights for patent applications filed by inventor Yang Kuo-Wei:
Kuo-Wei Yang from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of cleaning reaction chamber, method of forming protection film and protection wafer
#2 | 2007-07-26Method for manufacturing semiconductor device that includes baking a dielectric layer after exposure to plasma
6150587 ⎘