Munich
Germany
4
2012-12-27
The entities that hold a legal rights for patent applications filed by inventor Mathuni Josef:
Josef Mathuni from Munich, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus and method for producing microcomponents and use of
#2 | 2006-12-28Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles
#3 | 2006-06-20Photomask, in particular alternating phase shift mask, with compensation structure
#4 | 2005-07-19Production method for a halftone phase mask
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