Kasuga
Japan
6
2007-05-03
The entities that hold a legal rights for patent applications filed by inventor Iwai Tetsuhiro:
Tetsuhiro Iwai from Kasuga, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma processing apparatus
#2 | 2006-11-21Electrode member used in a plasma treating apparatus
#3 | 2006-07-11Plasma treating apparatus, plasma treating method and method of manufacturing semiconductor device
#4 | 2006-06-06Plasma processing apparatus and plasma processing method
#5 | 2005-07-26Plasma treating apparatus and plasma treating method
#6 | 2005-03-15Plasma processing method
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