Espoo
Finland
15
2023-06-22
The entities that hold a legal rights for patent applications filed by inventor Malinen Timo:
Timo Malinen from Espoo, FI has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of operating a deposition or cleaning apparatus
#2 | 2023-03-23Adjustable fluid inlet assembly for a substrate processing apparatus and method
#3 | 2021-06-24Adjustable fluid inlet assembly for a substrate processing apparatus and method
#4 | 2021-03-25UNIFORM DEPOSITION
#5 | 2019-12-26Deposition or cleaning apparatus with movable structure
#6 | 2019-06-27APPARATUS AND METHODS FOR ATOMIC LAYER DEPOSITION
#7 | 2018-04-12Atomic Layer Deposition with Plasma Source
#8 | 2017-11-30ALD method and apparatus including a photon source
#9 | 2017-11-30ALD method and apparatus
#10 | 2017-03-16Protecting an interior of a hollow body with an ALD coating
#11 | 2016-05-19Method and apparatus for forming a substrate web track in an atomic layer deposition reactor
#12 | 2016-03-17Protecting a target pump interior with an ALD coating
#13 | 2015-11-12Atomic layer deposition with plasma source
#14 | 2014-03-27Deposition reactor with plasma source
#15 | 2014-01-23Atomic layer deposition with plasma source
623045 ⎘