Hsinchu
Taiwan
8
2020-08-20
The entities that hold a legal rights for patent applications filed by inventor Shen Ching-Wei:
Ching-Wei Shen from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:
High durability extreme ultraviolet photomask
#2 | 2018-12-27High durability extreme ultraviolet photomask
#3 | 2018-06-07Systems and methods of EUV mask cleaning
#4 | 2017-12-07High durability extreme ultraviolet photomask
#5 | 2017-05-18Method and system for EUV mask cleaning with non-thermal solution
#6 | 2017-02-23Damage prevention on EUV mask
#7 | 2017-02-02Systems and methods of EUV mask cleaning
#8 | 2014-02-20Device manufacturing and cleaning method
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