Robert C. Hefty

City:

Mountain View, California

Country:

United States

Published Applications:

Last publication date:

2014-02-06

Top Assignees for applications by Robert C. Hefty

The entities that hold a legal rights for patent applications filed by inventor Hefty Robert C.:

LAM RESEARCH CORPORATION 1 Fremont, CA United States

Recent patent applications by Hefty Robert C.

Robert C. Hefty from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2014-02-06

US20140033828A1

Physics

Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber

#2 | 2007-01-25

US20070021935A1

Physics

Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber

InventorID:

635983 ⎘