Los Altos, California
United States
12
2014-02-06
The entities that hold a legal rights for patent applications filed by inventor Steger Robert J.:
Robert J. Steger from Los Altos, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support
#2 | 2011-10-27Substrate support having dynamic temperature control
#3 | 2011-08-09Substrate support having dynamic temperature control
#4 | 2009-05-14METHODS OF MAKING GAS DISTRIBUTION MEMBERS FOR PLASMA PROCESSING APPARATUSES
#5 | 2007-10-16Switched uniformity control
#6 | 2007-08-09Faraday Shield Disposed Within An Inductively Coupled Plasma Etching apparatus
#7 | 2007-05-29Faraday shield disposed within an inductively coupled plasma etching apparatus
#8 | 2006-08-17Methods of making gas distribution members for plasma processing apparatuses
#9 | 2005-12-20Methods and apparatus for in situ substrate temperature monitoring
#10 | 2005-05-24Method and apparatus for the compensation of edge ring wear in a plasma processing chamber
#11 | 2005-03-17Method and apparatus for the compensation of edge ring wear in a plasma processing chamber
#12 | 2005-02-03Method for balancing return currents in plasma processing apparatus
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