Burlington, Vermont
United States
6
2014-09-18
The entities that hold a legal rights for patent applications filed by inventor GALLAGHER Emily E.:
Emily E. GALLAGHER from Burlington, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks
#2 | 2014-02-20Reducing edge die reflectivity in extreme ultraviolet lithography
#3 | 2014-02-06Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks
#4 | 2012-03-22Method for determining mask operation activities
#5 | 2011-04-14Mask program defect test
#6 | 2005-12-01Light scattering EUVL mask
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