Berkeley, California
United States
3
2013-01-31
The entities that hold a legal rights for patent applications filed by inventor SOULET Axel:
Axel SOULET from Berkeley, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Reclaim function for semiconductor processing system
#2 | 2009-06-18Methods for checking and calibrating concentration sensors in a semiconductor processing chamber
#3 | 2009-06-04Reclaim function for semiconductor processing systems
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