Mitsuru Seki

City:

Chikusei

Country:

Japan

Published Applications:

Last publication date:

2019-10-31

Top Assignees for applications by Mitsuru Seki

The entities that hold a legal rights for patent applications filed by inventor Seki Mitsuru:

Mitsuru Seki from Chikusei, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Optical apparatus, exposure apparatus, method of manufacturing optical apparatus, and method of manufacturing article

Projection optical system, exposure apparatus, and device manufacturing method

InventorID:

6501163 ⎘