Tokyo
Japan
39
2021-09-16
The entities that hold a legal rights for patent applications filed by inventor OKABE Tsutomu:
Tsutomu OKABE from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Circulating EFEM
#2 | 2019-11-07Circulating EFEM
#3 | 2019-01-10EFEM and method of introducing dry air thereinto
#4 | 2018-12-06EFEM and method of introducing replacement gas thereinto
#5 | 2017-06-15Load port device and cleaning gas introducing method into a container on a load port
#6 | 2017-06-15Controlling method for a wafer transportation part and a load port part on an EFEM
#7 | 2017-06-15EFEM
#8 | 2017-06-15Mini-environment apparatus
#9 | 2013-01-31Load port apparatus and clamping device to be used for the same
#10 | 2012-10-18Lid opening/closing system of an airtight container
#11 | 2012-03-15Lid opening/closing system of an airtight container
#12 | 2011-09-08Substrate storage pod and lid opening/closing system for the same
#13 | 2011-09-01Substrate storage pod and lid member thereof, and processing apparatus for a substrate
#14 | 2011-09-01Substrate storage pod with replacement function of clean gas
#15 | 2010-11-18Lid opening/closing system for closed container and substrate processing method using same
#16 | 2010-08-26Lid opening/closing system of an airtight container
#17 | 2010-06-03Lid opening/closing system for closed container
#18 | 2010-05-13Closed container and lid opening/closing system therefor
#19 | 2010-03-11Closed container and lid opening/closing system therefor
#20 | 2010-03-02Wafer processing apparatus having dust proof function
#21 | 2009-12-03Contained object transfer system
#22 | 2009-11-10Wafer processing apparatus having dust proof function
#23 | 2009-10-27Wafer processing apparatus having dust proof function
#24 | 2009-10-01Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus
#25 | 2009-09-03Gas replacement system
#26 | 2009-07-09Contained object transfer system
#27 | 2009-05-26Wafer processing apparatus having dust proof function
#28 | 2009-02-05Method of processing an object in a container and lid opening/closing system used in the method
#29 | 2009-02-05Lid opening/closing system for closed container and substrate processing method using same
#30 | 2008-04-22Wafer processing apparatus including clean box stopping mechanism
#31 | 2007-09-13INTERFACE SEAL
#32 | 2007-07-05Lid opening/closing system of an airtight container
#33 | 2007-07-05Lid opening/closing system of an airtight container
#34 | 2006-12-28PURGE SYSTEM FOR A PRODUCT CONTAINER AND TABLE FOR USE IN THE PURGE SYSTEM
#35 | 2006-04-27Wafer detecting device
#36 | 2006-01-10Wafer processing apparatus capable of mapping wafers
#37 | 2005-12-01Load port for clean system
#38 | 2005-05-05Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
#39 | 2005-04-26Load port mounting mechanism
65409 ⎘