Aschaffenburg
Germany
2
2026-02-05
Michael Brendel from Aschaffenburg, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
REPAIR PROCESS FOR CLEAR DEFECTS ON EUV PSM MASKS
METHOD AND APPARATUS FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROLITHOGRAPHIC PHOTOMASK
6584171 ⎘