Oberkochen
Germany
2
2024-03-28
Matthias Manger from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
OPTICAL APPARATUS, METHOD FOR SETTING A TARGET DEFORMATION, AND LITHOGRAPHY SYSTEM
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT OF A PROJECTION EXPOSURE APPARATUS
6597775 ⎘