Stefan SCHMIDT

City:

Mettlach

Country:

Germany

Published Applications:

Last publication date:

2024-09-12

Recent patent applications by SCHMIDT Stefan

Stefan SCHMIDT from Mettlach, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

METHOD FOR DEPOSITING A COVER LAYER, EUV LITHOGRAPHY SYSTEM AND OPTICAL ELEMENT

PROCESS FOR DEPOSITION OF AN OUTER LAYER, REFLECTIVE OPTICAL ELEMENT FOR THE EUV WAVELENGTH RANGE AND EUV LITHOGRAPHY SYSTEM

InventorID:

6618281 ⎘