Bern
Switzerland
8
2015-07-02
The entities that hold a legal rights for patent applications filed by inventor Waldis Severin:
Severin Waldis from Bern, CH has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD FOR REGULATING THE TILTING OF A MIRROR ELEMENT
#2 | 2014-11-13Microlithographic projection exposure apparatus
#3 | 2014-11-06Optical component
#4 | 2014-11-06Optical component
#5 | 2014-10-16Illumination system of a microlithographic projection exposure apparatus having a temperature control device
#6 | 2014-08-07Light modulator and illumination system of a microlithographic projection exposure apparatus
#7 | 2014-02-27Mirror array
#8 | 2013-03-28Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method
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